Open AccessIon implantation range and energy deposition codes COREL, RASE4, and DAMG2
Author(s) -
Denise Brice
Publication year - 1977
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/5283068
Subject(s) - ion , range (aeronautics) , atomic physics , gaussian , energy (signal processing) , atom (system on chip) , perpendicular , physics , gaussian function , computational physics , materials science , geometry , mathematics , computer science , quantum mechanics , composite material , embedded system
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