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Thin film corrosion. Final report
Author(s) -
M.K. Raut
Publication year - 1980
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/5281108
Subject(s) - chromium , materials science , corrosion , metallurgy , etching (microfabrication) , tantalum , photolithography , metal , tantalum nitride , thin film , nanotechnology , layer (electronics)

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