Open AccessPhase 2 of the automated array assembly task of the Low-Cost Silicon Solar Array Project. Technical quarterly report No. 6, 1 October 1979-31 December 1979
Author(s) -
M. G. Coleman,
R. A. Pryor,
T. Sparks,
D. L. Saltzman
Publication year - 1979
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/5277125
Subject(s) - materials science , wafer , etching (microfabrication) , silicon , copper , layer (electronics) , plating (geology) , ion implantation , copper plating , ion beam , electroplating , optoelectronics , fabrication , nanotechnology , chemical engineering , metallurgy , ion , chemistry , medicine , alternative medicine , organic chemistry , pathology , geophysics , geology , engineering
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