Open AccessComputer control and data management in an LSI fabrication facility
Author(s) -
L. A. Doyal,
D. L. Weaver,
C. W. Gwyn
Publication year - 1980
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/5268737
Subject(s) - wafer fabrication , minicomputer , wafer , computer science , process control , process (computing) , engineering , real time computing , electrical engineering , operating system
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