Open AccessMiniature high current metal ion source
Author(s) -
I.G. Brown,
James E. Galvin,
R.A. MacGill,
R. T. Wright
Publication year - 1986
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/5215408
Subject(s) - ion source , ion , vacuum arc , ion beam deposition , current (fluid) , ion current , ion beam , plasma , materials science , brightness , atomic physics , ion gun , arc (geometry) , range (aeronautics) , metal , beam (structure) , chemistry , optics , physics , nuclear physics , metallurgy , geometry , mathematics , organic chemistry , composite material , thermodynamics
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