Open AccessUniform aluminum deposits on large nonplanar and planar polyimide substrates by physical vapor deposition
Author(s) -
G.J. Hale
Publication year - 1980
Language(s) - English
Resource type - Reports
DOI - 10.2172/5185473
Subject(s) - planar , polyimide , materials science , masking (illustration) , substrate (aquarium) , shadow mask , deposition (geology) , chemical vapor deposition , aluminium , physical vapor deposition , composite material , mineralogy , optics , layer (electronics) , thin film , optoelectronics , chemistry , nanotechnology , geology , physics , art , paleontology , visual arts , oceanography , computer graphics (images) , sediment , computer science