Energetic neutral beam cleaning. Final CRADA report for CRADA number Y-1296-0427 | Zendy

D. E. Schechter | Zendy; C. C. Tsai | Zendy; C. A. Boitnott | Zendy

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Energetic neutral beam cleaning. Final CRADA report for CRADA number Y-1296-0427

Author(s) -

D. E. Schechter,

C. C. Tsai,

C. A. Boitnott

Publication year - 1996

Publication title -

osti oai (u.s. department of energy office of scientific and technical information)

Language(s) - English

Resource type - Reports

DOI - 10.2172/515581

Subject(s) - wafer , beam (structure) , microwave , materials science , particle beam , nuclear engineering , atomic physics , optoelectronics , optics , physics , engineering , telecommunications

The purpose of this project is to evaluate the feasibility of cleaning silicon wafers with an energetic (1 to 100 eV) neutral particle beam and to develop a viable neutral beam source. A microwave plasma source on an existing test stand was modified to produce a 2-cm diameter neutral beam for cleaning the wafers. Significant results regarding neutral beam wafer cleaning are reported

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