Open AccessSpray photoresist development on multiple hybrid microcircuit substrates
Author(s) -
L.E. Schantz
Publication year - 1975
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/5100273
Subject(s) - photoresist , nanotechnology , development (topology) , materials science , optoelectronics , mathematics , layer (electronics) , mathematical analysis