Open AccessTitanium/gold process characterization
Author(s) -
L.S. Fajardo
Publication year - 1991
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/5099099
Subject(s) - microelectronics , titanium , materials science , wafer , characterization (materials science) , fabrication , deposition (geology) , integrated circuit , metallurgy , nanotechnology , optoelectronics , medicine , paleontology , alternative medicine , pathology , sediment , biology
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