Open Accessdc glow-discharge cleaning for accelerator
Author(s) -
T. S. Chou,
H.C. Hseuh
Publication year - 1982
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/5075289
Subject(s) - glow discharge , argon , torr , plasma , beam (structure) , atomic physics , oxygen , materials science , proton , desorption , analytical chemistry (journal) , ultra high vacuum , ion , chemistry , optics , nanotechnology , physics , nuclear physics , adsorption , thermodynamics , organic chemistry , chromatography
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