Open AccessProcess feasibility study in support of silicon material, Task I. Quarterly technical progress report (IX)
Author(s) -
C.S. Fang,
K.C. Hansen,
Jerry Miller,
Carl L. Yaws
Publication year - 1977
Language(s) - English
Resource type - Reports
DOI - 10.2172/5064386
Subject(s) - silicon tetrachloride , silane , vaporization , dichlorosilane , silicon , thermal conductivity , materials science , process engineering , chemistry , thermodynamics , engineering , composite material , metallurgy , organic chemistry , physics