Micromachined chemical jet dispenser | Zendy

S. Swierkowski | Zendy; D. Ciarlo | Zendy

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Micromachined chemical jet dispenser

Author(s) -

S. Swierkowski,

D. Ciarlo

Publication year - 1996

Publication title -

osti oai (u.s. department of energy office of scientific and technical information)

Language(s) - English

Resource type - Reports

DOI - 10.2172/496142

Subject(s) - microelectromechanical systems , fabrication , jet (fluid) , surface micromachining , actuator , microfluidics , bulk micromachining , silicon , materials science , nanotechnology , microfabrication , piezoelectricity , mechanical engineering , acoustics , optoelectronics , electrical engineering , engineering , aerospace engineering , physics , composite material , medicine , alternative medicine , pathology

Goal is to develop a multi-channel micromachined chemical fluid jet dispenser that is applicable to prototype tests with biological samples that demonstrate its utility for molecular biology experiments. Objective is to demonstrate a new device capable of ultrasonically ejecting droplets from 10-200 {mu}m diameter capillaries that are arranged in an array that is linear or focused. The device is based on several common fabrication procedures used in MEMS (micro electro mechanical systems) technology: piezoelectric actuators, silicon, etc

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