Materials and corrosion characterization using the confocal resonator | Zendy

C.P. Tigges | Zendy; N.R. Sorensen | Zendy; V.M. Hietala | Zendy; T.A. Plut | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Materials and corrosion characterization using the confocal resonator

Author(s) -

C.P. Tigges,

N.R. Sorensen,

V.M. Hietala,

T.A. Plut

Publication year - 1997

Publication title -

osti oai (u.s. department of energy office of scientific and technical information)

Language(s) - English

Resource type - Reports

DOI - 10.2172/477763

Subject(s) - characterization (materials science) , materials science , corrosion , semiconductor device fabrication , resonator , semiconductor , nanotechnology , thin film , computer science , optoelectronics , metallurgy , wafer

Improved characterization and process control is important to many Sandia and DOE programs related to manufacturing. Many processes/structures are currently under-characterized including thin film growth, corrosion and semiconductor structures, such as implant profiles. A sensitive tool is required that is able to provide lateral and vertical imaging of the electromagnetic properties of a sample. The confocal resonator is able to characterize the surface and near-surface impedance of materials. This device may be applied to a broad range of applications including in situ evaluation of thin film processes, physical defect detection/characterization, the characterization of semiconductor devices and corrosion studies. In all of these cases, the technology should work as a real-time process diagnostic or as a feedback mechanism regarding the quality of a manufacturing process. This report summarizes the development and exploration of several diagnostic applications

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research