Open AccessMagnetically-excited flexural plate wave device
Author(s) -
M. A. Butler,
Stephen J. Martin,
J.J. Spates,
Michael A. Mitchell
Publication year - 1997
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/474933
Subject(s) - materials science , excited state , silicon nitride , lorentz force , flexural strength , silicon , optoelectronics , stiffening , broadband , membrane , acoustics , optics , composite material , atomic physics , chemistry , magnetic field , physics , quantum mechanics , biochemistry
Novel devices have been designed, fabricated, and tested that use the Lorentz force to excite flexural plate waves in a silicon nitride membrane. Single and dual port devices have been fabricated and the excitation spectra measured. Eigenmodes of the membrane are excited in this resonant device and non-linear effects, due to amplitude stiffening of the membrane, are observed. The effects of temperature and ambient gas on resonant frequency and Q have been explored. These devices have the advantage of material compatibility with silicon process technology and are capable of operating at very high temperatures
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom