Open AccessDynamics of electronegative plasmas for materials processing. Final report
Author(s) -
A. J. Lichtenberg,
Lieberman
Publication year - 1996
Language(s) - English
Resource type - Reports
DOI - 10.2172/465305
Subject(s) - plasma , atomic physics , particle (ecology) , inductively coupled plasma , materials science , chemistry , physics , nuclear engineering , nuclear physics , oceanography , engineering , geology
The purpose of this project is to study the equilibrium particle and energy balance and the heating mechanisms in electronegative r.f. discharges. Particular attention is given to the formation of non-Maxwellian electron distributions and their effect on the macroscopic parameters. The research includes theory, particle-in-cell simulation, and experimental investigations. The sheath heating theory and the simulation results developed for electropositive plasmas are used to guide the investigations. The investigation was centered on, but is not limited to, the study of oxygen feedstock gas in capacitively and inductively coupled r.f. discharges. 15 refs