Dynamics of electronegative plasmas for materials processing. Final report | Zendy

A. J. Lichtenberg | Zendy; M. A. Lieberman | Zendy

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Dynamics of electronegative plasmas for materials processing. Final report

Author(s) -

A. J. Lichtenberg,

M. A. Lieberman

Publication year - 1996

Publication title -

osti oai (u.s. department of energy office of scientific and technical information)

Language(s) - English

Resource type - Reports

DOI - 10.2172/443921

Subject(s) - plasma , atomic physics , particle (ecology) , inductively coupled plasma , materials science , particle in cell , mechanics , physics , nuclear physics , oceanography , geology

Purpose was to study equilibrium particle and energy balance and heating mechanisms in electronegative rf discharges. Attention is given to formation of non-Maxwellian electron distributions and their effect on macroscopic parameters. Research includes theory, particle- in-cell simulation, and experimental investigations. Sheath heating theory and simulation results for electropositive plasmas are used as guide. The investigation was centered on, but not limited to, study of oxygen feedstock gas in capacitively and inductively coupled rf discharges

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