Open AccessETCHING METALS BY IONIC BOMBARDMENT
Author(s) -
A J Carlson,
J. Williams,
Bruce Rogers,
Evangelos Manthos
Publication year - 1954
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/4396376
Subject(s) - ionic bonding , etching (microfabrication) , materials science , chemistry , nanotechnology , ion , organic chemistry , layer (electronics)