Open AccessSolution control for hybrid microcircuit etching
Author(s) -
Leon Lantz
Publication year - 1973
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/4366110
Subject(s) - etching (microfabrication) , etch pit density , materials science , optoelectronics , nanotechnology , analytical chemistry (journal) , chemistry , chromatography , layer (electronics)