Porous Si structure as moisture sensor | Zendy

D.W. Peterson | Zendy; Nguyễn Đức Văn | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Porous Si structure as moisture sensor

Author(s) -

D.W. Peterson,

Nguyễn Đức Văn

Publication year - 1996

Publication title -

osti oai (u.s. department of energy office of scientific and technical information)

Language(s) - English

Resource type - Reports

DOI - 10.2172/432952

Subject(s) - materials science , fabrication , moisture , capacitive sensing , porosity , encapsulation (networking) , composite material , nanotechnology , computer science , engineering , electrical engineering , medicine , computer network , alternative medicine , pathology

Development and characterization of a capacitive moisture sensor made from porous Si is presented. The sensor development was in support of the DoD funded Plastic Package Availability program and was intended for the detection of pinholes and defects in moisture barrier coatings applied to ICs during fabrication or during the plastic encapsulation assembly process

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research