Novel uses of a wide beam saddle field ion source for producing targets used in nuclear physics experiments at the Argonne National Laboratory ATLAS facility | Zendy

J. P. Greene | Zendy; Gary E. Thomas | Zendy; Stacey L Schiel | Zendy

Open Access

Novel uses of a wide beam saddle field ion source for producing targets used in nuclear physics experiments at the Argonne National Laboratory ATLAS facility

Author(s) -

J. P. Greene,

Gary E. Thomas,

Stacey L Schiel

Publication year - 1996

Publication title -

osti oai (u.s. department of energy office of scientific and technical information)

Language(s) - English

Resource type - Reports

DOI - 10.2172/425362

Subject(s) - national laboratory , atlas (anatomy) , sputtering , nuclear physics , ion beam , physics , nuclear engineering , beam (structure) , ion source , materials science , engineering physics , nanotechnology , engineering , optics , plasma , thin film , paleontology , biology

The wide beam ion sputter source has several unique characteristics which make it very useful for producing, reducing the thickness or cleaning the surface of targets needed for nuclear physics experiments. A discussion of these techniques as well as the sputter source characteristics will be given. Sputter yields obtained utilizing the source are presented for a variety of materials common to nuclear target production

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