Open Access''In-situ'' electron microscope investigation of the nucleation and growth of sputtered thin films. Annual technical progress report V
Author(s) -
T.E. Hutchinson,
Jerome P.Y. Maa,
Jae Chul Lee
Publication year - 1973
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/4245380
Subject(s) - nucleation , in situ , electron microscope , materials science , thin film , nanotechnology , microscope , engineering physics , optics , chemistry , engineering , physics , organic chemistry
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