Open AccessDeposition of thin, tapered aluminum films
Author(s) -
E.J. Hsieh,
Tim Brown,
K. E. Vindelov
Publication year - 1975
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/4187257
Subject(s) - fluence , plume , ionization , substrate (aquarium) , materials science , laser , pulsed laser deposition , analytical chemistry (journal) , optics , thin film , atomic physics , chemistry , physics , nanotechnology , ion , oceanography , organic chemistry , chromatography , thermodynamics , geology
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