Open Access''IN-SITU'' ELECTRON MICROSCOPE INVESTIGATION OF THE NUCLEATION AND GROWTH OF SPUTTERED THIN FILMS. Annual Technical Progress Report, III.
Author(s) -
T.E. Hutchinson,
Dudley M. Sherman
Publication year - 1971
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/4043573
Subject(s) - nucleation , in situ , thin film , electron microscope , materials science , nanotechnology , chemistry , optics , physics , organic chemistry