Diagnostic enhancements for plasma processing | Zendy

Gary S. Selwyn | Zendy; I. Henins | Zendy

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Diagnostic enhancements for plasma processing

Author(s) -

Gary S. Selwyn,

I. Henins

Publication year - 1998

Publication title -

osti oai (u.s. department of energy office of scientific and technical information)

Language(s) - English

Resource type - Reports

DOI - 10.2172/334299

Subject(s) - national laboratory , plasma , atmospheric research , environmental science , raman spectroscopy , excited state , spectroscopy , human decontamination , systems engineering , nuclear engineering , physics , process engineering , engineering physics , nuclear physics , engineering , meteorology , optics , astronomy

This is the final report of a one-year, Laboratory Directed Research and Development (LDRD) project at the Los Alamos National Laboratory (LANL). Funds obtained under this project were used to enhance the diagnostic capabilities of the plasma-processing program in the Physics Division at LANL and include successful development and implementation of in-situ Raman spectroscopy and infrared emission spectroscopy. These methods were used to detect the presence and nature of ground-state and electronically excited molecular oxygen formed in an atmospheric-pressure, nonthermal plasma source used for environmental, industrial and decontamination applications

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