Open AccessScanning Probe-Based Processes for Nanometer-Scale Device Fabrication
Author(s) -
David P. Adams,
Jaclyn D. Houston-Kolnik,
Theresa Mayer,
B. S. Swartzentruber
Publication year - 1999
Language(s) - English
Resource type - Reports
DOI - 10.2172/3196
Subject(s) - fabrication , characterization (materials science) , nanotechnology , nanometre , nanostructure , materials science , scanning probe microscopy , medicine , alternative medicine , pathology , composite material
This is the final report of an LDRD program entitled 'Scanning Probe-Based Processes for Nanometer-Scale Device Fabrication'. This program intends to expand Sandia's expertise in scanning-probe based fabrication and characterization of nanostructures. Our object is to achieve an order of magnitude decrease in feature size compared to conventional fabrication technology. We are exploring approaches to nanostructure fabrication and characterization using scanning probe-based (STM, AFM). We also are developing numerical simulations of localized electric field and emission current to explore mechanisms and characterize limits to processing techniques. We emphasize novel fabrication processes and characterization of physical, chemical and electronic effects in nanostructures