Open AccessDeveloping multi-layer mirror technology near 45 nm using Sc/Si interfaces
Author(s) -
Joseph Nilsen,
Alan F. Jankowski,
L. Friedman,
Chris Walton
Publication year - 2004
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/15009781
Subject(s) - materials science , layer (electronics) , wavelength , optoelectronics , laser , range (aeronautics) , work (physics) , optics , silicon , nanotechnology , physics , mechanical engineering , engineering , composite material
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