Open AccessMicrorelay
Author(s) -
A Bernhardt,
G Cooper,
V Malba
Publication year - 2000
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/15005119
Subject(s) - contact resistance , relay , fabrication , electrical contacts , reliability (semiconductor) , materials science , contact force , voltage , mechanical engineering , welding , semiconductor device fabrication , electrical engineering , contact area , semiconductor , nanotechnology , engineering , optoelectronics , composite material , power (physics) , medicine , physics , alternative medicine , layer (electronics) , quantum mechanics , pathology , wafer