Open AccessChemical Vapor Deposition of Aluminum
Author(s) -
L. Lantz
Publication year - 1973
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/12483024
Subject(s) - chemical vapor deposition , deposition (geology) , aluminium , materials science , environmental chemistry , chemical engineering , nanotechnology , chemistry , metallurgy , engineering , geology , paleontology , sediment
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