Open AccessPHOTORESIST CHARACTERIZATION METHOD FOR HYBRID MICROCIRCUrTS
Author(s) -
L.E. Schantz
Publication year - 1972
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/12482968
Subject(s) - photoresist , characterization (materials science) , dominance (genetics) , computer science , materials science , biological system , process engineering , nanotechnology , chemistry , engineering , layer (electronics) , biology , biochemistry , gene
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