Open AccessImproved Precision Aluminum Etchant
Author(s) -
W. H. Knopf
Publication year - 1976
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/12042174
Subject(s) - photoresist , iodine , stripping (fiber) , aluminium , iodide , chemistry , materials science , process engineering , nanotechnology , inorganic chemistry , metallurgy , composite material , engineering , layer (electronics)
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