Open AccessAdvanced Detector Research - Fabrication and Testing of 3D Active-Edge Silicon Sensors: High Speed, High Yield
Author(s) -
S. I. Parker
Publication year - 2008
Language(s) - English
Resource type - Reports
DOI - 10.2172/1062729
Subject(s) - detector , quality assurance , planar , enhanced data rates for gsm evolution , yield (engineering) , production (economics) , computer science , fabrication , computer hardware , embedded system , engineering , materials science , telecommunications , operating system , operations management , medicine , external quality assessment , alternative medicine , pathology , economics , metallurgy , macroeconomics
Development of 3D silicon radiation sensors employing electrodes fabricated perpendicular to the sensor surfaces to improve fabrication yields and increasing pulse speeds