Open AccessDiagnostics and Microelectronics
Author(s) -
J.W. Balch
Publication year - 1993
Language(s) - English
Resource type - Reports
DOI - 10.2172/10194490
Subject(s) - microelectronics , microfabrication , surface micromachining , photonics , materials science , semiconductor , silicon , semiconductor device fabrication , fabrication , optoelectronics , semiconductor device , nanotechnology , engineering physics , engineering , wafer , medicine , alternative medicine , pathology , layer (electronics)