Open AccessParallel nanometer scale fabrication. Final report, September 19, 1989--September 14, 1992
Author(s) -
Kenneth T. Douglas
Publication year - 1993
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/10192664
Subject(s) - nanolithography , fabrication , nanometre , nanotechnology , materials science , silicon , lithography , porous silicon , heterojunction , scale (ratio) , quantum dot , optoelectronics , physics , medicine , alternative medicine , pathology , composite material , quantum mechanics
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