Open AccessCharacterization and performance of DLC films synthesized by plasma and ion beam techniques
Author(s) -
K.C. Walter,
H. Kung,
Timothy E. Levine
Publication year - 1994
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/10182138
Subject(s) - elastic recoil detection , materials science , diamond like carbon , analytical chemistry (journal) , tetramethylsilane , hydrogen , cathodic arc deposition , carbon film , amorphous carbon , ion , thin film , cathodic protection , amorphous solid , anode , electrode , chemistry , nanotechnology , crystallography , organic chemistry , chromatography
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