Open AccessGrowth Mechanisms and Characterization of Hydrogenated Amorphous-Silicon-Alloy Films, Annual Subcontract Report, 14 February 1992 - 13 February 1993
Author(s) -
A. C. Gallagher,
David M. Tanenbaum,
Arnaldo Laracuente,
E. C. Molenbroek
Publication year - 1993
Language(s) - English
Resource type - Reports
DOI - 10.2172/10181927
Subject(s) - materials science , silane , amorphous solid , surface roughness , silicon , glow discharge , deposition (geology) , amorphous silicon , analytical chemistry (journal) , nanotechnology , optoelectronics , composite material , crystallography , chemistry , crystalline silicon , paleontology , plasma , physics , chromatography , quantum mechanics , sediment , biology