Open AccessElimination of internal contamination on semiconductor devices (protective coatings). Final report
Author(s) -
Torres del Castillo
Publication year - 1994
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/10170074
Subject(s) - epoxy , silicon , semiconductor , materials science , semiconductor device , silicon dioxide , coating , contamination , chip , composite material , optoelectronics , forensic engineering , electrical engineering , layer (electronics) , engineering , ecology , biology
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