Open AccessSmall-Angle X-Ray Scattering Studies of Microvoids in Amorphous-Silicon-Based Semiconductors: Final Subcontract Report, 1 February 1991 - 31 January 1994
Author(s) -
D. L. Williamson,
S. J. Jones,
Y. Chen
Publication year - 1994
Language(s) - English
Resource type - Reports
DOI - 10.2172/10170005
Subject(s) - small angle x ray scattering , materials science , microstructure , scattering , amorphous solid , silicon , amorphous silicon , semiconductor , alloy , optoelectronics , crystalline silicon , nanotechnology , optics , crystallography , composite material , chemistry , physics