Open AccessThe influence of wavelength-dependent radiation in simulation of lamp-heated rapid thermal processing systems
Author(s) -
A. Ting
Publication year - 1994
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/10169463
Subject(s) - microelectronics , opacity , thermal , wavelength , process (computing) , rapid thermal processing , workstation , radiative transfer , thermal radiation , computer science , process engineering , radiation , nuclear engineering , computational science , simulation , mechanical engineering , materials science , optics , engineering , optoelectronics , physics , operating system , meteorology , thermodynamics
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