Open AccessTribological properties of reactively sputtered nitrides and carbides of titanium, zirconium and hafnium. Final report
Author(s) -
Michael E. Graham,
Peng Chang,
W.D. Sproul
Publication year - 1994
Language(s) - English
Resource type - Reports
DOI - 10.2172/10163628
Subject(s) - materials science , tin , coating , nitride , metallurgy , tribology , sputter deposition , zirconium nitride , carbide , sputtering , titanium nitride , high speed steel , hafnium , titanium , zirconium , cavity magnetron , composite material , thin film , layer (electronics) , nanotechnology
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