Open AccessHigh accuracy electron-impact photoemission cross section measurements for the EUV radiometric standard. Final report
Author(s) -
John S. Risley
Publication year - 1989
Language(s) - English
Resource type - Reports
DOI - 10.2172/10158076
Subject(s) - extreme ultraviolet lithography , synchrotron radiation , spectrometer , cross section (physics) , excitation , line (geometry) , detector , electron ionization , physics , beamline , atomic physics , electron spectrometer , electron , optics , ionization , nuclear physics , cathode ray , ion , beam (structure) , geometry , mathematics , quantum mechanics
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