Open AccessSmall-Angle X-Ray Scattering Studies of Microvoids in Amorphous Silicon-Based Semiconductors: Annual Subcontract Report, 1 February 1992 - 31 January 1993
Author(s) -
D. L. Williamson,
S.J. Jones,
Y. Chen
Publication year - 1994
Language(s) - Uncategorized
Resource type - Reports
DOI - 10.2172/10157618
Subject(s) - materials science , microstructure , substrate (aquarium) , small angle x ray scattering , silicon , semiconductor , amorphous solid , deposition (geology) , scattering , amorphous silicon , engineering physics , photovoltaic system , electronics , optoelectronics , nanotechnology , crystalline silicon , optics , metallurgy , crystallography , electrical engineering , physics , chemistry , engineering , paleontology , oceanography , sediment , biology , geology