Open AccessInvestigation of PACVD protective coating processes using advanced diagnostics techniques. Performance report, 1 September 1992--30 April 1993
Author(s) -
W. C. Roman
Publication year - 1993
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/10155222
Subject(s) - diborane , raman spectroscopy , coating , materials science , laser , chemical vapor deposition , deposition (geology) , analytical chemistry (journal) , nanotechnology , chemical engineering , optics , chemistry , boron , physics , engineering , environmental chemistry , geology , organic chemistry , paleontology , sediment
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