Open AccessCompilation of diamond-like carbon properties for barriers and hard coatings
Author(s) -
Duane A. Outka,
W. L. Hsu,
K. Phillips,
D.R. Boehme,
Ning Yang,
David K. Ottesen,
H. A. Johnsen,
W. Miles Clift,
T.J. Headley
Publication year - 1994
Language(s) - English
Resource type - Reports
DOI - 10.2172/10151476
Subject(s) - materials science , nanoindentation , diamond like carbon , coating , amorphous solid , carbon fibers , sputter deposition , amorphous carbon , sputtering , wear resistance , lubricity , composite material , nanotechnology , thin film , chemistry , composite number , organic chemistry
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