Open AccessCompilation of diamond-like carbon properties for barriers and hard coatings
Author(s) -
D A Outka,
Wen L Hsu,
K Phillips,
D R Boehme,
Na Yeong Yang,
D K Ottesen,
H A Johnsen,
W. Miles Clift,
T.J. Headley
Publication year - 1994
Language(s) - English
Resource type - Reports
DOI - 10.2172/10151476
Subject(s) - materials science , nanoindentation , diamond like carbon , coating , amorphous solid , carbon fibers , sputter deposition , amorphous carbon , sputtering , wear resistance , lubricity , composite material , nanotechnology , thin film , chemistry , composite number , organic chemistry