Open AccessLaser drilling of vertical vias in silicon
Author(s) -
W.D. Miller,
R.A. Gassman,
David M Keicher
Publication year - 1993
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/10142258
Subject(s) - laser drilling , interconnection , wafer , laser , materials science , silicon , parametric statistics , drilling , optoelectronics , laser cutting , optics , computer science , metallurgy , statistics , physics , mathematics , computer network
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