Open AccessAlloy sputtering at high fluence: Preferential sputtering and competing effects
Author(s) -
P. Sigmund,
A. Oliva
Publication year - 1992
Language(s) - English
Resource type - Reports
DOI - 10.2172/10141417
Subject(s) - sputtering , fluence , alloy , chemistry , work (physics) , stoichiometry , mixing (physics) , materials science , ion , thermodynamics , physics , metallurgy , nanotechnology , thin film , quantum mechanics , organic chemistry