Open AccessIdentification of nitriding mechanisms in high purity reaction bonded silicon nitride
Author(s) -
J. S. Haggerty
Publication year - 1993
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/10140324
Subject(s) - nitriding , nitride , silicon nitride , materials science , silicon , amorphous solid , analytical chemistry (journal) , chemical engineering , crystallography , nanotechnology , chemistry , metallurgy , layer (electronics) , engineering , chromatography
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