Open AccessSoft x-ray microradiography and lithograph using a laser produced plasma source. Final report
Author(s) -
Ping C. Cheng
Publication year - 1992
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/10125907
Subject(s) - optics , plasma , x ray , displacement (psychology) , laser , physics , cone (formal languages) , beam (structure) , laser beams , locus (genetics) , geometry , mathematics , algorithm , chemistry , psychology , biochemistry , gene , quantum mechanics , psychotherapist
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