Open AccessThe decomposition of methyltrichlorosilane: Studies in a high-temperature flow reactor
Author(s) -
Allendorf,
Thomas H. Osterheld,
Carl F. Melius
Publication year - 1994
Language(s) - English
Resource type - Reports
DOI - 10.2172/10122856
Subject(s) - decomposition , silicon carbide , silane , chemical vapor deposition , thermal decomposition , methane , hydrogen chloride , hydrogen , chemistry , chemical decomposition , chemical engineering , pyrolysis , materials science , inorganic chemistry , organic chemistry , engineering