Open AccessDeposition and properties of novel nitride superlattice coatings. Progress report, September 27, 1990--May 27, 1992
Author(s) -
Scott A. Barnett,
W.D. Sproul
Publication year - 1991
Publication title -
osti oai (u.s. department of energy office of scientific and technical information)
Language(s) - English
Resource type - Reports
DOI - 10.2172/10122029
Subject(s) - superlattice , tin , crystallite , materials science , nitride , deposition (geology) , thin film , crystal (programming language) , metallurgy , nanotechnology , optoelectronics , layer (electronics) , paleontology , sediment , computer science , biology , programming language
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