Open AccessControl of thin film processing behavior through precursor structural modifications
Author(s) -
R W Schwartz,
J A Voigt,
T J Boyle,
T A Christenson,
C D Buchheit
Publication year - 1995
Language(s) - English
Resource type - Reports
DOI - 10.2172/10117184
Subject(s) - thin film , alkoxide , materials science , crystallization , sol gel , microstructure , chemical engineering , steric effects , chelation , coating , zirconium , nanotechnology , organic chemistry , composite material , metallurgy , chemistry , catalysis , engineering