Open AccessControl of thin film processing behavior through precursor structural modifications
Author(s) -
Robert W. Schwartz,
J.A. Voigt,
T.J. Boyle,
T.A. Christenson,
Catherine D. Buchheit
Publication year - 1995
Language(s) - English
Resource type - Reports
DOI - 10.2172/10117184
Subject(s) - thin film , alkoxide , materials science , crystallization , sol gel , microstructure , chemical engineering , steric effects , chelation , coating , zirconium , nanotechnology , organic chemistry , composite material , metallurgy , chemistry , catalysis , engineering
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom